PLUGIN Handbook 2019

The products of the MODULE-F range are totally removable and reversible. 1 - Insert the 4 screws on the module from the air to the vacuum side 2 - Properly clean the mounting ange with iso-propyl alcohol 3 - Properly clean the at viton gasket with iso-propyl alcohol 4 - Place the at viton gasket in the seal groove of the module 5 - Place the MODULE-F against the vacuum ange from the air side 6 - Tighten the 4 screws on the air side by respecting the tightening torque (see below) MODULE-F - Mounting process 61 All surfaces should be cleaned before mounting. After rst vacuum drop down, screws may be tightened again. Recommended surface roughness < Ra 0,8 - Tightening torque : 1,2 N.m Modules may be delivered as spare parts or fully assembled and tested on ange. Leakrate : < 1.10-8 mbar.l/s - Temperature Range : -40°C / +80°C